Inventor · disambiguated record

Shunji Shuto

Also filed as: SHUTO SHUNJI

1 granted patent·22 citations·filing 2004–2004

41Inventor score

Technology areasY02P

Files withTOSHIBA KK1

Top patents by PatentIndex Score

1 record

0182US7702413B2Semiconductor device manufacturing system and method for manufacturing semiconductor devices including calculating oxide film thickness using real time simulatorTOSHIBA KK·Filed 2004·Granted Apr 20, 2010·22 cites·17 claims

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