Inventor · disambiguated record
Gota Niimi
Also filed as: NIIMI GOTA
9 granted patents·10 citations·filing 2006–2021
76Inventor score
Top patents by PatentIndex Score
9 records- 0187US9480136B2Extreme UV radiation light source deviceUSHIO ELECTRIC INC·Filed 2014·Granted Oct 25, 2016·10 cites·7 claims
- 0258US11940736B2Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
- 0351US9686846B2Extreme UV radiation light source deviceUSHIO ELECTRIC INC·Filed 2016·Granted Jun 20, 2017·0 cites·6 claims
- 0446US11145429B2Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic deviceGIGAPHOTON INC·Filed 2020·Granted Oct 12, 2021·0 cites·20 claims
- 0544US9572240B2Light source apparatusUSHIO ELECTRIC INC·Filed 2014·Granted Feb 14, 2017·0 cites·18 claims
- 0640US9581392B2Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this typeUSHIO ELECTRIC INC·Filed 2015·Granted Feb 28, 2017·0 cites·20 claims
- 0740US9202659B2Arrangement and method for cooling a plasma-based radiation sourceUSHIO ELECTRIC INC·Filed 2014·Granted Dec 1, 2015·0 cites·16 claims
- 0832US7482740B2Electrode unit of extreme ultraviolet generatorUSHIO ELECTRIC INC·Filed 2006·Granted Jan 27, 2009·0 cites·9 claims
- 0931US10591342B2Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source deviceUSHIO ELECTRIC INC·Filed 2015·Granted Mar 17, 2020·0 cites·17 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →