Inventor · disambiguated record
Naofumi Kishita
Also filed as: KISHITA NAOFUMI
13 granted patents·1 pending application·73 citations·filing 2002–2017
89Inventor score
Top patents by PatentIndex Score
14 records- 0187US9620394B2Liquid treatment apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Apr 11, 2017·8 cites·9 claims
- 0286US10643872B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted May 5, 2020·5 cites·10 claims
- 0386USD610176SCoater cupTOKYO ELECTRON LTD·Filed 2009·Granted Feb 16, 2010·37 cites·1 claims
- 0482US9027508B2Periphery coating apparatus, periphery coating method and storage medium thereforTOKYO ELECTRON LTD·Filed 2013·Granted May 12, 2015·5 cites·12 claims
- 0581US9899244B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Feb 20, 2018·5 cites·9 claims
- 0679US8375887B2Solution treatment apparatus, solution treatment method and resist coating methodTOKYO ELECTRON LTD·Filed 2010·Granted Feb 19, 2013·5 cites·4 claims
- 0758US8671875B2Liquid processing apparatus, liquid processing method and storage mediumNAGAMINE SHUICHI·Filed 2009·Granted Mar 18, 2014·2 cites·7 claims
- 0857US7344600B2Substrate treatment apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Mar 18, 2008·6 cites·18 claims
- 0952US7984690B2Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Jul 26, 2011·0 cites·26 claims
- 1051US8722152B2Wet processing apparatus, wet processing method and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted May 13, 2014·0 cites·4 claims
- 1148US9082614B1Periphery coating apparatus, periphery coating method and storage medium thereforTOKYO ELECTRON LTD·Filed 2015·Granted Jul 14, 2015·0 cites·3 claims
- 1246US8354141B2Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage mediumTOKYO ELECTRON LTD·Filed 2011·Granted Jan 15, 2013·0 cites·22 claims
- 1345US2008289715A1Complex pipe and coating/development processing apparatus equipped with complex pipeTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1440US8522714B2Wet processing apparatus, wet processing method and storage mediumKISHITA NAOFUMI·Filed 2011·Granted Sep 3, 2013·0 cites·5 claims
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