Inventor · disambiguated record
Mats Ekberg
Also filed as: EKBERG MATS
6 granted patents·1 pending application·175 citations·filing 1997–2023
82Inventor score
Top patents by PatentIndex Score
7 records- 0196US6883158B1Method for error reduction in lithographyMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Apr 19, 2005·130 cites·38 claims
- 0279US6226163B1Device and method relating to protection of an object against over-currents comprising over-current reductionASEA BROWN BOVERI·Filed 1997·Granted May 1, 2001·38 cites·46 claims
- 0364US8067134B2Method of iterative compensation for non-linear effects in three-dimensional exposure of resistSANDSTROEM TORBJOERN·Filed 2009·Granted Nov 29, 2011·1 cites·23 claims
- 0457US2025144836A1Machine for Dividing a Timber Body and Method for Controlling Such a MachineUSNR AB·Filed 2023·Application pending·0 cites
- 0550US7923182B2Multi-focus method of enhanced three-dimensional exposure of resistMICRONIC LASER SYSTEMS AB·Filed 2009·Granted Apr 12, 2011·2 cites·17 claims
- 0638US8057971B2Method of compensation for bleaching of resist during three-dimensional exposure of resistSANDSTROEM TORBJOERN·Filed 2009·Granted Nov 15, 2011·0 cites·21 claims
- 0731US6263124B1Photoconductive switchABB AB·Filed 1999·Granted Jul 17, 2001·4 cites·32 claims
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