Inventor · disambiguated record
Raymond M. Khoury
Also filed as: KHOURY RAYMOND · KHOURY RAYMOND M
9 granted patents·260 citations·filing 1999–2003
90Inventor score
Files withIBM9
Top patents by PatentIndex Score
9 records- 0190US6343974B1Real-time method for profiling and conditioning chemical-mechanical polishing padsIBM·Filed 2000·Granted Feb 5, 2002·43 cites·16 claims
- 0287US6837777B2Wafer edge cleaning utilizing polish pad materialIBM·Filed 2003·Granted Jan 4, 2005·39 cites·13 claims
- 0386US6622334B1Wafer edge cleaning utilizing polish pad materialIBM·Filed 2000·Granted Sep 23, 2003·35 cites·8 claims
- 0479US6217422B1Light energy cleaning of polishing padsIBM·Filed 1999·Granted Apr 17, 2001·49 cites·25 claims
- 0578US6467120B1Wafer cleaning brush profile modificationIBM·Filed 1999·Granted Oct 22, 2002·55 cites·12 claims
- 0669US6942549B2Two-sided chemical mechanical polishing pad for semiconductor processingIBM·Filed 2003·Granted Sep 13, 2005·13 cites·3 claims
- 0769US6227948B1Polishing pad reconditioning via polishing pad material as conditionerIBM·Filed 2000·Granted May 8, 2001·13 cites·13 claims
- 0863US6620029B2Apparatus and method for front side chemical mechanical planarization (CMP) of semiconductor workpiecesIBM·Filed 2002·Granted Sep 16, 2003·9 cites·20 claims
- 0950US6334230B1Wafer cleaning apparatusIBM·Filed 2001·Granted Jan 1, 2002·4 cites·5 claims
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