Inventor · disambiguated record
Tetsuya Marubayashi
Also filed as: MARUBAYASHI TETSUYA
6 granted patents·2 pending applications·41 citations·filing 1998–2020
81Inventor score
Top patents by PatentIndex Score
8 records- 0182US8071477B2Method of manufacturing semiconductor device and substrate processing apparatusMORIYA ATSUSHI·Filed 2009·Granted Dec 6, 2011·6 cites·5 claims
- 0280US8070880B2Substrate processing apparatusMARUBAYASHI TETSUYA·Filed 2008·Granted Dec 6, 2011·11 cites·17 claims
- 0367USD997892SEnd effector for handling wafersKOKUSAI ELECTRIC CORP·Filed 2020·Granted Sep 5, 2023·5 cites·1 claims
- 0459US6332898B1Substrate processing apparatus and maintenance method thereforKOKUSAI ELECTRIC CO LTD·Filed 2000·Granted Dec 25, 2001·6 cites·25 claims
- 0549US6143040ASubstrate processing apparatus and maintenance method thereforKOKUSAI ELECTRIC CO LTD·Filed 1998·Granted Nov 7, 2000·13 cites·23 claims
- 0647US2010058984A1Substrate Processing ApparatusMARUBAYASHI TETSUYA·Filed 2009·Application pending·0 cites
- 0745US2020312631A1Reaction tube and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2020·Application pending·0 cites
- 0837US11359283B2Reaction tube structure and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2017·Granted Jun 14, 2022·0 cites·18 claims
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