Inventor · disambiguated record

Satoru Sagou

Also filed as: SAGOU SATORU

3 granted patents·103 citations·filing 1996–2000

76Inventor score

Technology areasG03F

Files withFUJITSU LTD3

Top patents by PatentIndex Score

3 records

0193US6222195B1Charged-particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 2000·Granted Apr 24, 2001·49 cites·22 claims
0275US5830612AMethod of detecting a deficiency in a charged-particle-beam exposure maskFUJITSU LTD·Filed 1996·Granted Nov 3, 1998·28 cites·11 claims
0373US6137111ACharged particle-beam exposure device and charged-particle-beam exposure methodFUJITSU LTD·Filed 1998·Granted Oct 24, 2000·26 cites·41 claims

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