Inventor · disambiguated record
Wu-Hung Ko
Also filed as: KO WU-HUNG
8 granted patents·2 pending applications·5 citations·filing 2003–2024
78Inventor score
Top patents by PatentIndex Score
10 records- 0195US11809076B2Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 7, 2023·2 cites·20 claims
- 0284US12153341B2Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 26, 2024·0 cites·20 claims
- 0383US2024385512A1Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0476US10983430B2Mask assembly and haze acceleration methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 20, 2021·1 cites·17 claims
- 0571US11347143B2Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 31, 2022·0 cites·20 claims
- 0669US11703752B2Method of accelerated hazing of mask assemblyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 0765US9726990B2Lithography mask repair methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 8, 2017·1 cites·20 claims
- 0862US8703364B2Method for repairing photomaskHSIEH KUN-LUNG·Filed 2012·Granted Apr 22, 2014·1 cites·19 claims
- 0942US2020124994A1Mask treating method and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Application pending·0 cites
- 1036US7097948B2Method for repair of photomasksTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 29, 2006·0 cites·12 claims
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