Inventor · disambiguated record
Larry E. Frisa
Also filed as: FRISA LARRY · FRISA LARRY E · FRISA LARRY EDWARD
10 granted patents·2 pending applications·531 citations·filing 1988–2007
91Inventor score
Top patents by PatentIndex Score
12 records- 0197US6027961ACMOS semiconductor devices and method of formationMOTOROLA INC·Filed 1998·Granted Feb 22, 2000·358 cites·17 claims
- 0274US6028003AMethod of forming an interconnect structure with a graded composition using a nitrided targetMOTOROLA INC·Filed 1997·Granted Feb 22, 2000·47 cites·21 claims
- 0371US6671059B2Method and system for determining a thickness of a layerMOTOROLA INC·Filed 2002·Granted Dec 30, 2003·12 cites·12 claims
- 0470US6686633B1Semiconductor device, memory cell, and processes for forming themMOTOROLA INC·Filed 2000·Granted Feb 3, 2004·16 cites·20 claims
- 0570US5961791AProcess for fabricating a semiconductor deviceMOTOROLA INC·Filed 1997·Granted Oct 5, 1999·42 cites·40 claims
- 0664US6184073B1Process for forming a semiconductor device having an interconnect or conductive film electrically insulated from a conductive member or regionMOTOROLA INC·Filed 1997·Granted Feb 6, 2001·27 cites·14 claims
- 0763US6786222B2Method for removing particles from a semiconductor processing toolMOTOROLA INC·Filed 2002·Granted Sep 7, 2004·9 cites·21 claims
- 0863US4891525ASKM ion sourceEATON CORP·Filed 1988·Granted Jan 2, 1990·12 cites·14 claims
- 0958US6472237B1Method and system for determining a thickness of a layerMOTOROLA INC·Filed 2001·Granted Oct 29, 2002·5 cites·13 claims
- 1050US6426698B1Lot signalling deviceMOTOROLA INC·Filed 2000·Granted Jul 30, 2002·3 cites·11 claims
- 1148US2006269851A1Photomask and method for conveying information associated with a photomask substrateFRISA LARRY E·Filed 2006·Application pending·0 cites
- 1232US2009004077A1Apparatus and Method for Preventing Haze Growth on a Surface of a SubstrateFRISA LARRY E·Filed 2007·Application pending·0 cites
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