Inventor · disambiguated record
Fujihiko Toyomasu
Also filed as: TOYOMASU FUJIHIKO
15 granted patents·1 pending application·61 citations·filing 2000–2025
88Inventor score
Files withEBARA CORP16
Top patents by PatentIndex Score
16 records- 0189US6338671B1Apparatus for supplying polishing liquidEBARA CORP·Filed 2000·Granted Jan 15, 2002·41 cites·27 claims
- 0278US11358253B2Cleaning liquid supply device, cleaning unit, and storage medium storing programEBARA CORP·Filed 2017·Granted Jun 14, 2022·2 cites·6 claims
- 0371US2025381574A1Chemical liquid supply device, cleaning system and liquid supply methodEBARA CORP·Filed 2025·Application pending·0 cites
- 0469US12447449B2Chemical supply apparatus, cleaning system, and chemical supply methodEBARA CORP·Filed 2023·Granted Oct 21, 2025·0 cites·11 claims
- 0569US12042901B2Cleaning liquid supply device, cleaning unit, and storage medium storing programEBARA CORP·Filed 2022·Granted Jul 23, 2024·0 cites·12 claims
- 0669US6802762B2Method for supplying slurry to polishing apparatusEBARA CORP·Filed 2001·Granted Oct 12, 2004·13 cites·13 claims
- 0768US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 0860US10926301B2Liquid supplying device and liquid supplying methodEBARA CORP·Filed 2019·Granted Feb 23, 2021·0 cites·7 claims
- 0956US10343192B2Liquid supplying device and liquid supplying methodEBARA CORP·Filed 2018·Granted Jul 9, 2019·0 cites·3 claims
- 1053US6722953B2Abrasive liquid feed apparatus, method for feeding additive to abrasive liquid feed apparatus, and polishing apparatusEBARA CORP·Filed 2001·Granted Apr 20, 2004·4 cites·12 claims
- 1151US12208428B2Liquid supplying device and method for draining liquid thereofEBARA CORP·Filed 2020·Granted Jan 28, 2025·0 cites·6 claims
- 1251US11890652B2Cleaning chemical liquid supply device and cleaning chemical liquid supply methodEBARA CORP·Filed 2021·Granted Feb 6, 2024·0 cites·7 claims
- 1346US12140980B2Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrateEBARA CORP·Filed 2020·Granted Nov 12, 2024·0 cites·16 claims
- 1443US10373845B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2013·Granted Aug 6, 2019·0 cites·5 claims
- 1534US10438818B2Substrate processing apparatus and pipe cleaning method for substrate processing apparatusEBARA CORP·Filed 2015·Granted Oct 8, 2019·0 cites·13 claims
- 1634US10340159B2Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unitEBARA CORP·Filed 2015·Granted Jul 2, 2019·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →