Inventor · disambiguated record
John Francis Grant
Also filed as: GRANT JOHN F · GRANT JOHN FRANCIS
2 granted patents·22 citations·filing 1998–2008
57Inventor score
Top patents by PatentIndex Score
2 records- 0166US7977628B2System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapesAXCELIS TECH INC·Filed 2008·Granted Jul 12, 2011·2 cites·4 claims
- 0251US6215125B1Method to operate GEF4 gas in hot cathode discharge ion sourcesIBM·Filed 1998·Granted Apr 10, 2001·20 cites·25 claims
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