Inventor · disambiguated record
Shu Kino
Also filed as: KINO SHU
3 granted patents·1 pending application·0 citations·filing 2020–2021
44Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0161US11881410B2Substrate processing apparatus and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 23, 2024·0 cites·14 claims
- 0256US11201063B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Dec 14, 2021·0 cites·18 claims
- 0355US12347645B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 1, 2025·0 cites·18 claims
- 0439US2022122813A1Substrate processing system, control method, and control programTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →