Inventor · disambiguated record
Leo Wilhelmus Maria Kuipers
Also filed as: KUIPERS LEO WILHELMUS MARIA
4 granted patents·23 citations·filing 2003–2004
72Inventor score
Top patents by PatentIndex Score
4 records- 0160US7245357B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 17, 2007·8 cites·20 claims
- 0250US7384228B2Insertion device, lithographic apparatus with said insertion device and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 10, 2008·4 cites·19 claims
- 0348US7394520B2Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lockASML NETHERLANDS BV·Filed 2004·Granted Jul 1, 2008·10 cites·25 claims
- 0437US8064730B2Device manufacturing method, orientation determination method and lithographic apparatusVISSER RAIMOND·Filed 2004·Granted Nov 22, 2011·1 cites·16 claims
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