Inventor · disambiguated record
Hidehito Saigusa
Also filed as: SAIGUSA HIDEHITO
11 granted patents·294 citations·filing 2002–2007
92Inventor score
Top patents by PatentIndex Score
11 records- 0194US7166200B2Method and apparatus for an improved upper electrode plate in a plasma processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Jan 23, 2007·49 cites·56 claims
- 0293US7163585B2Method and apparatus for an improved optical window deposition shield in a plasma processing systemTOKYO ELECTRON LTD·Filed 2004·Granted Jan 16, 2007·56 cites·24 claims
- 0392US7166166B2Method and apparatus for an improved baffle plate in a plasma processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Jan 23, 2007·40 cites·34 claims
- 0491US7811428B2Method and apparatus for an improved optical window deposition shield in a plasma processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Oct 12, 2010·14 cites·24 claims
- 0591US7566368B2Method and apparatus for an improved upper electrode plate in a plasma processing systemTOKYO ELECTRON LTD·Filed 2006·Granted Jul 28, 2009·13 cites·75 claims
- 0691US6798519B2Method and apparatus for an improved optical window deposition shield in a plasma processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Sep 28, 2004·44 cites·40 claims
- 0790US7678226B2Method and apparatus for an improved bellows shield in a plasma processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Mar 16, 2010·15 cites·35 claims
- 0881US8117986B2Apparatus for an improved deposition shield in a plasma processing systemSAIGUSA HIDEHITO·Filed 2006·Granted Feb 21, 2012·6 cites·22 claims
- 0981US7204912B2Method and apparatus for an improved bellows shield in a plasma processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Apr 17, 2007·23 cites·30 claims
- 1077US7137353B2Method and apparatus for an improved deposition shield in a plasma processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Nov 21, 2006·32 cites·49 claims
- 1170US8118936B2Method and apparatus for an improved baffle plate in a plasma processing systemSAIGUSA HIDEHITO·Filed 2007·Granted Feb 21, 2012·2 cites·26 claims
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