Inventor · disambiguated record
Cheng-Chung Lim
Also filed as: LIM CHENG-CHUNG
3 granted patents·1 pending application·2 citations·filing 2007–2011
53Inventor score
Top patents by PatentIndex Score
4 records- 0165US8021492B2Method of cleaning turbo pump and chamber/turbo pump clean processUNITED MICROELECTRONICS CORP·Filed 2007·Granted Sep 20, 2011·2 cites·38 claims
- 0244US8277567B2Method of cleaning turbo pump and chamber/turbo pump clean processPOH KIAN-SOONG·Filed 2011·Granted Oct 2, 2012·0 cites·20 claims
- 0341US2008260946A1Clean method for vapor deposition processUNITED MICROELECTRONICS CORP·Filed 2007·Application pending·0 cites
- 0440US8328938B2Buffer apparatus and thin film deposition systemLIM CHENG-CHUNG·Filed 2008·Granted Dec 11, 2012·0 cites·9 claims
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