Inventor · disambiguated record
Riichiro Harano
Also filed as: HARANO RIICHIRO
5 granted patents·53 citations·filing 1998–2006
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0171US6725565B2Method for vacuum drying of substrateSPROUT CO LTD·Filed 2002·Granted Apr 27, 2004·19 cites·17 claims
- 0263US8196594B2Apparatus for removing foreign material from substrate and method for removing foreign material from substrateHARANO RIICHIRO·Filed 2006·Granted Jun 12, 2012·3 cites·16 claims
- 0363US8158238B2Electrostatic chuck and electrode sheet for electrostatic chuckMIYASHITA KINYA·Filed 2006·Granted Apr 17, 2012·3 cites·11 claims
- 0452US6676766B2Method for cleaning a substrate using a sherbet-like compositionSPROUT CO LTD·Filed 2001·Granted Jan 13, 2004·8 cites·11 claims
- 0548US6220935B1Apparatus and method for cleaning substrateSPROUT CO LTD·Filed 1998·Granted Apr 24, 2001·20 cites·11 claims
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