Inventor · disambiguated record
Yu Nagatomo
Also filed as: NAGATOMO YU
5 granted patents·6 citations·filing 2015–2019
66Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0180US9779961B2Etching methodTOKYO ELECTRON LTD·Filed 2015·Granted Oct 3, 2017·4 cites·12 claims
- 0276US11049730B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jun 29, 2021·2 cites·14 claims
- 0345US10685848B2Workpiece processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Jun 16, 2020·0 cites·6 claims
- 0442US10566209B2Etching method and workpiece processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Feb 18, 2020·0 cites·18 claims
- 0531US9786512B2Etching methodTOKYO ELECTRON LTD·Filed 2016·Granted Oct 10, 2017·0 cites·15 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →