Inventor
MOTOMATSU KAZUKI
JP6 patents
Patents
6 patentsUS12571120B2Mar 10, 2026
Plating apparatus
TOKYO ELECTRON LTD0 citations61
US10689762B2Jun 23, 2020
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD1 citations61
US11441225B2Sep 13, 2022
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations49
US10584420B2Mar 10, 2020
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
TOKYO ELECTRON LTD0 citations39
US9822453B2Nov 21, 2017
Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program
TOKYO ELECTRON LTD0 citations39
US10081033B2Sep 25, 2018
Heat exchange system, and substrate processing apparatus having same
TOKYO ELECTRON LTD0 citations38