Inventor · disambiguated record
Keisuke Egashira
Also filed as: EGASHIRA KEISUKE
20 granted patents·4 pending applications·27 citations·filing 2012–2021
90Inventor score
Top patents by PatentIndex Score
24 records- 0188US10576493B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 3, 2020·6 cites·9 claims
- 0286US10504718B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 10, 2019·5 cites·10 claims
- 0385US10395950B2Substrate processing apparatus, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 27, 2019·5 cites·10 claims
- 0482US10566182B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Feb 18, 2020·3 cites·14 claims
- 0581US10998186B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted May 4, 2021·2 cites·14 claims
- 0680US10950465B2Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 16, 2021·3 cites·7 claims
- 0776US10692739B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 23, 2020·2 cites·8 claims
- 0866US11950298B2Communication processing system for working machine and communication processing method for working machineKUBOTA KK·Filed 2021·Granted Apr 2, 2024·0 cites·18 claims
- 0961US10967834B2Working machine, anti-theft system for the same, anti-theft method for the sameKUBOTA KK·Filed 2018·Granted Apr 6, 2021·1 cites·13 claims
- 1058US10986674B2Communication processing system for working machine and communication processing method for working machineKUBOTA KK·Filed 2018·Granted Apr 20, 2021·0 cites·9 claims
- 1152US10904930B2Communication system for working machine, mobile terminal, and communication processing method for working machineKUBOTA KK·Filed 2018·Granted Jan 26, 2021·0 cites·20 claims
- 1248US11951939B2Anti-theft system for working machine, anti-theft control method of the working machine, and the working machineKUBOTA KK·Filed 2020·Granted Apr 9, 2024·0 cites·3 claims
- 1346US10904819B2Communication device for working machine, mobile terminal, communication system for working machine, and communication processing method for working machineKUBOTA KK·Filed 2018·Granted Jan 26, 2021·0 cites·18 claims
- 1445US10939355B2Communication device for working machine, mobile terminal, communication system for working machine, and communication processing method for working machineKUBOTA KK·Filed 2018·Granted Mar 2, 2021·0 cites·12 claims
- 1543US11425560B2Communication system for working machine and communication processing method for working machineKUBOTA KK·Filed 2018·Granted Aug 23, 2022·0 cites·19 claims
- 1641US9865452B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jan 9, 2018·0 cites·11 claims
- 1740US8969218B2Etching method, etching apparatus and storage mediumWATANABE TSUKASA·Filed 2012·Granted Mar 3, 2015·0 cites·12 claims
- 1838US2020020550A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1938US2018254180A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 2037US10867814B2Liquid processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 15, 2020·0 cites·17 claims
- 2137US10366877B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jul 30, 2019·0 cites·8 claims
- 2237US2018138058A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 2336US2017092484A1Method and apparatus for drying semiconductor substrates using liquid carbon dioxideTOKYO ELECTRON LTD·Filed 2016·Application pending·0 cites
- 2430US9922849B2Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereofTOKYO ELECTRON LTD·Filed 2015·Granted Mar 20, 2018·0 cites·14 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →