Inventor · disambiguated record
Leonid Shmaenok
Also filed as: SHMAENOK LEONID
4 granted patents·218 citations·filing 2000–2011
79Inventor score
Top patents by PatentIndex Score
4 records- 0194US6359969B1Filter for extreme ultraviolet lithographySTICHTING TECH WETENSCHAPP·Filed 2000·Granted Mar 19, 2002·186 cites·12 claims
- 0292US7372623B2Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·19 cites·23 claims
- 0390US7639418B2Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2008·Granted Dec 29, 2009·13 cites·23 claims
- 0446USRE44120EFilter for extreme ultraviolet lithographySHMAENOK LEONID·Filed 2011·Granted Apr 2, 2013·0 cites·21 claims
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