Inventor · disambiguated record
Tarek Lutz
Also filed as: LUTZ TAREK
4 granted patents·7 citations·filing 2003–2005
63Inventor score
Files withINFINEON TECHNOLOGIES AG4
Top patents by PatentIndex Score
4 records- 0160US7087910B2Method for detecting and compensating for positional displacements in photolithographic mask units and apparatus for carrying out the methodINFINEON TECHNOLOGIES AG·Filed 2004·Granted Aug 8, 2006·5 cites·10 claims
- 0245US6953644B2Method for compensating for scatter/reflection effects in particle beam lithographyINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 11, 2005·2 cites·11 claims
- 0344US7289231B2Apparatus and method for determining physical properties of a mask blankINFINEON TECHNOLOGIES AG·Filed 2003·Granted Oct 30, 2007·0 cites·18 claims
- 0441US7410732B2Process for producing a maskINFINEON TECHNOLOGIES AG·Filed 2005·Granted Aug 12, 2008·0 cites·19 claims
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