Inventor · disambiguated record
Kazumoto Tochihara
Also filed as: TOCHIHARA KAZUMOTO
3 granted patents·1 pending application·43 citations·filing 1990–2002
69Inventor score
Files withUSHIO ELECTRIC INC4
Top patents by PatentIndex Score
4 records- 0174US5168021AMethod for exposing predetermined area of peripheral part of waferUSHIO ELECTRIC INC·Filed 1990·Granted Dec 1, 1992·33 cites·2 claims
- 0253US6721037B2Device for exposure of a peripheral area of a waferUSHIO ELECTRIC INC·Filed 2002·Granted Apr 13, 2004·5 cites·7 claims
- 0352US6700643B2Device for exposure of a peripheral area of a film circuit boardUSHIO ELECTRIC INC·Filed 2001·Granted Mar 2, 2004·5 cites·6 claims
- 0435US2003096196A1Process for curing of a resist which has been applied to a large substrate, and device for carrying out of the processUSHIO ELECTRIC INC·Filed 2002·Application pending·0 cites
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