Inventor · disambiguated record
Pen-Nan Liao
Also filed as: LIAO PEN-NAN
3 granted patents·0 citations·filing 2015–2022
40Inventor score
Top patents by PatentIndex Score
3 records- 0157US12019368B2Removal of contaminants from EUV masksDUPONT ELECTRONICS INC·Filed 2022·Granted Jun 25, 2024·0 cites·12 claims
- 0246US12054659B2Hydrogen peroxide decomposition inhibitorKANTO KAGAKU·Filed 2020·Granted Aug 6, 2024·0 cites·4 claims
- 0343US10655231B2Etchant composition for multilayered metal film of copper and molybdenum, method of etching using said composition, and method for prolonging life of said compositionKANTO KAGAKU·Filed 2015·Granted May 19, 2020·0 cites·2 claims
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