Inventor · disambiguated record
James Eugene Caron
Also filed as: CARON JAMES · CARON JAMES E · Caron James Eugene
7 granted patents·2 pending applications·63 citations·filing 2008–2022
83Inventor score
Top patents by PatentIndex Score
9 records- 0193US10699878B2Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ringLAM RES CORP·Filed 2017·Granted Jun 30, 2020·12 cites·27 claims
- 0286US10147588B2System and method for increasing electron density levels in a plasma of a substrate processing systemLAM RES CORP·Filed 2017·Granted Dec 4, 2018·5 cites·19 claims
- 0383US10727089B2Systems and methods for selectively etching filmLAM RES CORP·Filed 2017·Granted Jul 28, 2020·4 cites·15 claims
- 0483US8916022B1Plasma generator systems and methods of forming plasmaCARON JAMES·Filed 2008·Granted Dec 23, 2014·25 cites·20 claims
- 0567US10438833B2Wafer lift ring system for wafer transferLAM RES CORP·Filed 2017·Granted Oct 8, 2019·1 cites·12 claims
- 0667USD641829SPlasma reactor showerhead face plate having concentric ridge patternNOVELLUS SYSTEMS INC·Filed 2010·Granted Jul 19, 2011·16 cites·1 claims
- 0762US12362159B2Systems and methods for controlling a plasma sheath characteristicLAM RES CORP·Filed 2022·Granted Jul 15, 2025·0 cites·19 claims
- 0845US2012108072A1Showerhead configurations for plasma reactorsANGELOV IVELIN A·Filed 2010·Application pending·0 cites
- 0935US2018233321A1Ion directionality escLAM RES CORP·Filed 2017·Application pending·0 cites
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