Inventor · disambiguated record
Neema Rastgar
Also filed as: RASTGAR NEEMA
4 granted patents·3 pending applications·92 citations·filing 2014–2022
71Inventor score
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0194US9620376B2Self limiting lateral atomic layer etchLAM RES CORP·Filed 2015·Granted Apr 11, 2017·90 cites·16 claims
- 0274US10714354B2Self limiting lateral atomic layer etchLAM RES CORP·Filed 2017·Granted Jul 14, 2020·2 cites·16 claims
- 0363US12322579B2Metal contamination reduction in substrate processing systems with transformer coupled plasmaLAM RES CORP·Filed 2021·Granted Jun 3, 2025·0 cites·12 claims
- 0456US2024396372A1Junction System for Direct-Drive Radiofrequency Power SupplyLAM RES CORP·Filed 2022·Application pending·0 cites
- 0555US11056321B2Metal contamination reduction in substrate processing systems with transformer coupled plasmaLAM RES CORP·Filed 2019·Granted Jul 6, 2021·0 cites·14 claims
- 0647US2023154728A1Methods and Systems for Controlling Radiofrequency Pulse-Initiation Power Spike for Plasma Sheath StabilizationLAM RES CORP·Filed 2021·Application pending·0 cites
- 0744US2016181111A1Silicon etch and cleanLAM RES CORP·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →