Inventor · disambiguated record
Zishu Zhang
Also filed as: ZHANG ZISHU
14 granted patents·2 pending applications·28 citations·filing 2008–2014
88Inventor score
Top patents by PatentIndex Score
16 records- 0186US8288083B2Methods of forming patterned masksZHANG ZISHU·Filed 2010·Granted Oct 16, 2012·8 cites·28 claims
- 0285US8486611B2Semiconductor constructions and methods of forming patternsMILLWARD DAN·Filed 2010·Granted Jul 16, 2013·7 cites·16 claims
- 0383US8815497B2Semiconductor constructions and methods of forming patternsMICRON TECHNOLOGY INC·Filed 2013·Granted Aug 26, 2014·5 cites·24 claims
- 0481US8440371B2Imaging devices, methods of forming same, and methods of forming semiconductor device structuresHE YUAN·Filed 2011·Granted May 14, 2013·3 cites·24 claims
- 0573US8883372B2Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patternsLIGHT SCOTT·Filed 2012·Granted Nov 11, 2014·2 cites·18 claims
- 0669US8507191B2Methods of forming a patterned, silicon-enriched developable antireflective material and semiconductor device structures including the sameMILLWARD DAN B·Filed 2011·Granted Aug 13, 2013·2 cites·31 claims
- 0766US8625078B2Illumination design for lens heating mitigationZHOU JIANMING·Filed 2011·Granted Jan 7, 2014·1 cites·6 claims
- 0857US2015015860A1Reticles, And Methods Of Mitigating Asymmetric Lens Heating In PhotolithographyMICRON TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 0956US2014247476A1Lithography wave-front control system and methodMICRON TECHNOLOGY INC·Filed 2014·Application pending·0 cites
- 1053US9140977B2Imaging devices, methods of forming same, and methods of forming semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2013·Granted Sep 22, 2015·0 cites·20 claims
- 1151US8845908B2Reticles, and methods of mitigating asymmetric lens heating in photolithographyLIGHT SCOTT L·Filed 2010·Granted Sep 30, 2014·0 cites·24 claims
- 1251US8736814B2Lithography wave-front control system and methodHE YUAN·Filed 2011·Granted May 27, 2014·0 cites·23 claims
- 1349US8476002B2Methods of forming patterned masksZHANG ZISHU·Filed 2012·Granted Jul 2, 2013·0 cites·16 claims
- 1447US8409457B2Methods of forming a photoresist-comprising pattern on a substrateZHANG ZISHU·Filed 2008·Granted Apr 2, 2013·0 cites·38 claims
- 1543US9235134B2Lens heating compensation in photolithographyHE YUAN·Filed 2010·Granted Jan 12, 2016·0 cites·21 claims
- 1642US8728721B2Methods of processing substratesLIGHT SCOTT L·Filed 2011·Granted May 20, 2014·0 cites·12 claims
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