Inventor · disambiguated record
Masataka Hatta
Also filed as: HATTA MASATAKA
13 granted patents·803 citations·filing 1990–2014
92Inventor score
Top patents by PatentIndex Score
13 records- 0197US5198752AElectric probing-test machine having a cooling systemTOKYO ELECTRON LTD·Filed 1991·Granted Mar 30, 1993·231 cites·6 claims
- 0297US5084671AElectric probing-test machine having a cooling systemTOKYO ELECTRON LTD·Filed 1990·Granted Jan 28, 1992·372 cites·16 claims
- 0393US6037793AInspecting method and apparatus for semiconductor integrated circuitTOKYO ELECTRON LTD·Filed 1998·Granted Mar 14, 2000·111 cites·24 claims
- 0482US6032724ATemperature control apparatus for sample susceptorTOKYO ELECTRON LTD·Filed 1997·Granted Mar 7, 2000·71 cites·9 claims
- 0576US9562942B2Probe apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Feb 7, 2017·3 cites·18 claims
- 0669US7818972B2Water removal apparatus and inspection apparatus including sameTOKYO ELECTRON LTD·Filed 2006·Granted Oct 26, 2010·3 cites·8 claims
- 0769US7610756B2Cooling/heating apparatus and mounting apparatusTOKYO ELECTRON LTD·Filed 2007·Granted Nov 3, 2009·3 cites·4 claims
- 0862US9310814B2Cooling device operating method and inspection apparatusHATTA MASATAKA·Filed 2012·Granted Apr 12, 2016·2 cites·4 claims
- 0960US7975759B2Temperature control method, temperature control apparatus and high/low temperature processing systemTOKYO ELECTRON LTD·Filed 2007·Granted Jul 12, 2011·2 cites·9 claims
- 1049US9739828B2Probe deviceTOKYO ELECTRON LTD·Filed 2014·Granted Aug 22, 2017·0 cites·10 claims
- 1148US6959556B2Stirling refrigeration systemTOKYO ELECTRON LTD·Filed 2003·Granted Nov 1, 2005·5 cites·11 claims
- 1247US9891274B2Device test methodTOKYO ELECTRON LTD·Filed 2014·Granted Feb 13, 2018·0 cites·7 claims
- 1341US7641453B2Pulsation reducing apparatus and inspection apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Jan 5, 2010·0 cites·20 claims
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