Inventor · disambiguated record
Kento Tsukano
Also filed as: TSUKANO KENTO
6 granted patents·3 pending applications·21 citations·filing 2017–2018
77Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0188US10576493B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Granted Mar 3, 2020·6 cites·9 claims
- 0286US10504718B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 10, 2019·5 cites·10 claims
- 0385US10395950B2Substrate processing apparatus, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 27, 2019·5 cites·10 claims
- 0480US10950465B2Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 16, 2021·3 cites·7 claims
- 0576US10692739B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 23, 2020·2 cites·8 claims
- 0644US11133176B2Substrate processing method, recording medium and substrate processing systemTOKYO ELECTRON LTD·Filed 2018·Granted Sep 28, 2021·0 cites·6 claims
- 0738US2020020550A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0838US2018254180A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0937US2018138058A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →