Inventor · disambiguated record
Takuro Masuzumi
Also filed as: MASUZUMI TAKURO
10 granted patents·6 pending applications·16 citations·filing 2014–2025
82Inventor score
Files withTOKYO ELECTRON LTD16
Top patents by PatentIndex Score
16 records- 0186US10504718B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 10, 2019·5 cites·10 claims
- 0285US10395950B2Substrate processing apparatus, substrate processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Aug 27, 2019·5 cites·10 claims
- 0380US10950465B2Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 16, 2021·3 cites·7 claims
- 0476US10692739B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jun 23, 2020·2 cites·8 claims
- 0567US10727042B2Liquid processing method, substrate processing apparatus and recording mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jul 28, 2020·1 cites·9 claims
- 0658US2024395573A1Bonding method and bonding systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0754US12469685B2Surface modifying apparatus and bonding strength determination methodTOKYO ELECTRON LTD·Filed 2022·Granted Nov 11, 2025·0 cites·7 claims
- 0853US2025293065A1Bonding apparatus and bonding methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0950US2024079214A1Surface modifying method and surface modifying apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1049US11201050B2Substrate processing method, recording medium and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 14, 2021·0 cites·14 claims
- 1144US11133176B2Substrate processing method, recording medium and substrate processing systemTOKYO ELECTRON LTD·Filed 2018·Granted Sep 28, 2021·0 cites·6 claims
- 1243US2014373877A1Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 1338US2018254180A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1437US10867814B2Liquid processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Dec 15, 2020·0 cites·17 claims
- 1537US2018138058A1Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1635US10261521B2Processing apparatus, processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted Apr 16, 2019·0 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →