Inventor · disambiguated record
Tat-Kwan Yu
Also filed as: YU TAT-KWAN · YU TAT-KWAN EDGAR
8 granted patents·565 citations·filing 1993–2002
91Inventor score
Top patents by PatentIndex Score
8 records- 0194US5441598APolishing pad for chemical-mechanical polishing of a semiconductor substrateMOTOROLA INC·Filed 1993·Granted Aug 15, 1995·96 cites·19 claims
- 0294US5399234AAcoustically regulated polishing processMOTOROLA INC·Filed 1993·Granted Mar 21, 1995·114 cites·5 claims
- 0389US6661711B2Implementation of an inhibit during soft programming to tighten an erase voltage distributionSANDISK CORP·Filed 2002·Granted Dec 9, 2003·57 cites·29 claims
- 0488US5628862APolishing pad for chemical-mechanical polishing of a semiconductor substrateMOTOROLA INC·Filed 1995·Granted May 13, 1997·68 cites·20 claims
- 0588US5531861AChemical-mechanical-polishing pad cleaning process for use during the fabrication of semiconductor devicesMOTOROLA INC·Filed 1995·Granted Jul 2, 1996·111 cites·12 claims
- 0686US6396158B1Semiconductor device and a process for designing a maskMOTOROLA INC·Filed 1999·Granted May 28, 2002·81 cites·23 claims
- 0784US6593226B2Method for adding features to a design layout and process for designing a maskMOTOROLA INC·Filed 2001·Granted Jul 15, 2003·34 cites·35 claims
- 0833US5674352AProcess related to a modified polishing pad for polishingMOTOROLA INC·Filed 1995·Granted Oct 7, 1997·4 cites·18 claims
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