Inventor · disambiguated record
Norihiko Tsuji
Also filed as: TSUJI NORIHIKO
9 granted patents·3 pending applications·39 citations·filing 2005–2019
84Inventor score
Top patents by PatentIndex Score
12 records- 0195US10134619B2Connecting mechanism and connecting method of substrate containerTOKYO ELECTRON LTD·Filed 2017·Granted Nov 20, 2018·20 cites·10 claims
- 0280US11527426B2Substrate processing deviceTOKYO ELECTRON LTD·Filed 2018·Granted Dec 13, 2022·3 cites·9 claims
- 0378US7537628B2Exhaust trap deviceTOKYO ELECTRON LTD·Filed 2005·Granted May 26, 2009·6 cites·4 claims
- 0475US9732881B2Gate valve and substrate processing systemTOKYO ELECTRON LTD·Filed 2015·Granted Aug 15, 2017·2 cites·7 claims
- 0571US8758511B2Film forming apparatus and vaporizerIIZUKA HACHISHIRO·Filed 2005·Granted Jun 24, 2014·2 cites·25 claims
- 0671US8057564B2Exhaust trap deviceTSUJI NORIHIKO·Filed 2009·Granted Nov 15, 2011·5 cites·12 claims
- 0770US10811289B2Substrate transfer apparatus and substrate processing system comprising plural connection units arranged side by side in a vertical and lateral directions along one side surface of a transfer chamberTOKYO ELECTRON LTD·Filed 2019·Granted Oct 20, 2020·1 cites·9 claims
- 0843US10867820B2Substrate transfer device and substrate transfer methodTOKYO ELECTRON LTD·Filed 2018·Granted Dec 15, 2020·0 cites·1 claims
- 0943US8835873B2Continuous sterilization systemAIREX CO LTD·Filed 2012·Granted Sep 16, 2014·0 cites·10 claims
- 1043US2011265725A1Film deposition device and substrate processing deviceTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 1142US2009038548A1Substrate treating apparatus and treating gas emitting mechanismTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1236US2011226178A1Film deposition systemTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →