Inventor · disambiguated record
Francis Fahrni
Also filed as: FAHRNI FRANCIS
5 granted patents·1 pending application·3 citations·filing 2008–2020
65Inventor score
Top patents by PatentIndex Score
6 records- 0182US12072636B2Fluid handling system and lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Aug 27, 2024·1 cites·20 claims
- 0265US8610878B2Lithographic apparatus and methodBASELMANS JOHANNES JACOBUS MATHEUS·Filed 2010·Granted Dec 17, 2013·2 cites·20 claims
- 0354US10916453B2Lithographic apparatus, method of transferring a substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 9, 2021·0 cites·20 claims
- 0443US10409174B2Lithographic apparatus, method of transferring a substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Sep 10, 2019·0 cites·23 claims
- 0539US2010212762A1Microfluidic system based on actuator elementsSTITCHING DUTCH POLYMER INST·Filed 2008·Application pending·0 cites
- 0636US11762304B2Lithographic apparatusASML NETHERLANDS BV·Filed 2016·Granted Sep 19, 2023·0 cites·22 claims
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