Inventor · disambiguated record
Robbert W. E. Van De Kruijs
Also filed as: VAN DE KRUIJS ROBBERT W E · VAN DE KRUIJS ROBBERT WILHELMU · VAN DE KRUIJS ROBBERT WILHELMUS ELISABETH
3 granted patents·3 pending applications·31 citations·filing 2003–2023
66Inventor score
Top patents by PatentIndex Score
6 records- 0175US8144830B2Reflective optical element for EUV lithography deviceYAKSHIN ANDREY E·Filed 2009·Granted Mar 27, 2012·10 cites·21 claims
- 0275US7261957B2Multilayer system with protecting layer system and production methodZEISS CARL SMT AG·Filed 2003·Granted Aug 28, 2007·21 cites·6 claims
- 0356US2025147440A1Pellicles and membranes for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0453US9733580B2Method for producing a reflective optical element for EUV-lithographyZEISS CARL SMT GMBH·Filed 2013·Granted Aug 15, 2017·0 cites·8 claims
- 0550US2007281109A1Multilayer system with protecting layer system and production methodZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 0634US2016116648A1Optical element comprising a multilayer coating, and optical arrangement comprising sameZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
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