Inventor · disambiguated record
Jeffery W. Butterbaugh
Also filed as: BUTTERBAUGH JEFFERY W
23 granted patents·8 pending applications·834 citations·filing 1994–2023
96Inventor score
Technology areasH10P
Files withTEL FSI INC11FSI INT INC6TEL MFG AND ENGINEERING OF AMERICA INC5FSI INT4BUTTERBAUGH JEFFERY W2
Top patents by PatentIndex Score
31 records- 0192US5580421AApparatus for surface conditioningFSI INT·Filed 1994·Granted Dec 3, 1996·250 cites·36 claims
- 0291US7819984B2Process for treatment of substrates with water vapor or steamFSI INT INC·Filed 2008·Granted Oct 26, 2010·17 cites·6 claims
- 0390US10843236B2Systems and methods for rotating and translating a substrate in a process chamberTEL FSI INC·Filed 2018·Granted Nov 24, 2020·5 cites·14 claims
- 0490US10062596B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL FSI INC·Filed 2015·Granted Aug 28, 2018·5 cites·18 claims
- 0590US10020217B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL FSI INC·Filed 2015·Granted Jul 10, 2018·5 cites·20 claims
- 0690US10014191B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL FSI INC·Filed 2016·Granted Jul 3, 2018·5 cites·15 claims
- 0790US5716495ACleaning methodFSI INT·Filed 1996·Granted Feb 10, 1998·120 cites·38 claims
- 0888US5534107AUV-enhanced dry stripping of silicon nitride filmsFSI INT·Filed 1994·Granted Jul 9, 1996·114 cites·35 claims
- 0987US6124211ACleaning methodFSI INT INC·Filed 1995·Granted Sep 26, 2000·89 cites·21 claims
- 1086US10991610B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL FSI INC·Filed 2015·Granted Apr 27, 2021·4 cites·19 claims
- 1185US6015503AMethod and apparatus for surface conditioningFSI INT INC·Filed 1995·Granted Jan 18, 2000·89 cites·23 claims
- 1278US7025831B1Apparatus for surface conditioningFSI INT INC·Filed 1999·Granted Apr 11, 2006·57 cites·14 claims
- 1374US10748789B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL FSI INC·Filed 2018·Granted Aug 18, 2020·1 cites·8 claims
- 1474US6465374B1Method of surface preparationFSI INT INC·Filed 2000·Granted Oct 15, 2002·18 cites·21 claims
- 1573US5782986AProcess for metals removal using beta-diketone or beta-ketoimine ligand forming compoundsFSI INT·Filed 1996·Granted Jul 21, 1998·44 cites·24 claims
- 1670US2023352321A1Wet processing of microelectronic substrates with controlled mixing of fluids proximal to substrate surfacesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2023·Application pending·0 cites
- 1767US11458512B2Systems and methods for rotating and translating a substrate in a process chamberTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Granted Oct 4, 2022·0 cites·6 claims
- 1863US2021050233A1Systems and methods for treating substrates with cryogenic fluid mixturesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2020·Application pending·0 cites
- 1963US2022088647A1System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid spraysTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2021·Application pending·0 cites
- 2062US9059104B2Process for selectively removing nitride from substratesRATKOVICH ANTHONY S·Filed 2011·Granted Jun 16, 2015·2 cites·26 claims
- 2157US11207715B2System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid spraysTEL FSI INC·Filed 2019·Granted Dec 28, 2021·0 cites·21 claims
- 2255US11355376B2Systems and methods for treating substrates with cryogenic fluid mixturesTEL MFG AND ENGINEERING OF AMERICA INC·Filed 2015·Granted Jun 7, 2022·0 cites·19 claims
- 2351US2008006303A1Liquid aersol particle removal methodBUTTERBAUGH JEFFERY W·Filed 2007·Application pending·0 cites
- 2447US2011259376A1Wet processing of microelectronic substrates with controlled mixing of fluids proximal to substrate surfacesWAGENER THOMAS J·Filed 2011·Application pending·0 cites
- 2546US2011180114A1Liquid aerosol particle removal methodBUTTERBAUGH JEFFERY W·Filed 2011·Application pending·0 cites
- 2641US9299570B2Process for silicon nitride removal selective to SiGexTEL FSI INC·Filed 2013·Granted Mar 29, 2016·0 cites·19 claims
- 2741US8920577B2Process for treatment of substrates with water vapor or steamDEKRAKER DAVID·Filed 2010·Granted Dec 30, 2014·0 cites·19 claims
- 2841US6107166AVapor phase cleaning of alkali and alkaline earth metalsFSI INT INC·Filed 1997·Granted Aug 22, 2000·9 cites·25 claims
- 2939US2018190517A1Recipe selectable dispense system and method of operatingTEL FSI INC·Filed 2017·Application pending·0 cites
- 3036US9691628B2Process for silicon nitride removal selective to SiGexTEL FSI INC·Filed 2015·Granted Jun 27, 2017·0 cites·17 claims
- 3130US2016284535A1Method for wet stripping silicon-containing organic layersTEL FSI INC·Filed 2015·Application pending·0 cites
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