Inventor · disambiguated record
Robrecht De Weerdt
Also filed as: DE WEERDT ROBRECHT · DE WEERDT ROBRECHT E M · DE WEERDT ROBRECHT EMIEL MARIA
6 granted patents·1 pending application·53 citations·filing 2002–2006
81Inventor score
Files withASML NETHERLANDS BV7
Top patents by PatentIndex Score
7 records- 0170US6831285B2Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Dec 14, 2004·15 cites·39 claims
- 0269US7161657B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jan 9, 2007·11 cites·21 claims
- 0368US7126666B2Lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 24, 2006·12 cites·16 claims
- 0464US6998737B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Feb 14, 2006·13 cites·20 claims
- 0548US6885117B2Magnetic actuator under piezoelectric controlASML NETHERLANDS BV·Filed 2003·Granted Apr 26, 2005·2 cites·13 claims
- 0648US2006279141A1Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 0732US7280182B2Lithographic apparatus, device manufacturing method and computer programASML NETHERLANDS BV·Filed 2004·Granted Oct 9, 2007·0 cites·7 claims
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