Inventor · disambiguated record
Choshoku Sai
Also filed as: SAI CHOSHOKU
10 granted patents·1 pending application·66 citations·filing 2001–2018
86Inventor score
Files withCANON KK11
Top patents by PatentIndex Score
11 records- 0193US7443619B2Optical element holding apparatus, exposure apparatus and device manufacturing methodCANON KK·Filed 2006·Granted Oct 28, 2008·22 cites·8 claims
- 0283US7771065B2Optical unit and exposure apparatus having the sameCANON KK·Filed 2006·Granted Aug 10, 2010·7 cites·11 claims
- 0375US6658083B2Weight compensation apparatus, stage apparatus using the same, and exposure apparatusCANON KK·Filed 2001·Granted Dec 2, 2003·15 cites·19 claims
- 0469US10884236B2Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing articleCANON KK·Filed 2018·Granted Jan 5, 2021·1 cites·10 claims
- 0566US7232257B2Hydrostatic bearing and stage apparatus using sameCANON KK·Filed 2002·Granted Jun 19, 2007·11 cites·9 claims
- 0663US7207720B2Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Apr 24, 2007·8 cites·6 claims
- 0759US7453623B2Reflecting mirror and exposure apparatus using the sameCANON KK·Filed 2006·Granted Nov 18, 2008·2 cites·15 claims
- 0851US9557560B2Mirror unit and exposure apparatusCANON KK·Filed 2014·Granted Jan 31, 2017·0 cites·9 claims
- 0950US9568729B2Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Feb 14, 2017·0 cites·13 claims
- 1049US9465294B2Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Oct 11, 2016·0 cites·23 claims
- 1138US2005008269A1Hydrostatic bearing, alignment apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →