Inventor
TAKAHAMA HIROYUKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHAMA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS6887317B2May 3, 2005
Reduced friction lift pin
APPLIED MATERIALS INC68 citations97
US5589224ADec 31, 1996
Apparatus for full wafer deposition
APPLIED MATERIALS INC78 citations95
USD568914SMay 13, 2008
Substrate support lift pin
APPLIED MATERIALS INC19 citations92
USD904640SDec 8, 2020
Substrate carrier
APPLIED MATERIALS INC20 citations91
US5548964AAug 27, 1996
Method and apparatus for cooling a vacuum device
APPLIED MATERIALS INC21 citations89
US11251028B2Feb 15, 2022
Pre-clean chamber with integrated shutter garage
APPLIED MATERIALS INC4 citations71
US11201078B2Dec 14, 2021
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC2 citations71
US12228395B2Feb 18, 2025
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC0 citations50
US12125728B2Oct 22, 2024
Substrate carrier
APPLIED MATERIALS INC0 citations49