Inventor · disambiguated record
Han Saem Rhee
Also filed as: RHEE HAN SAEM
3 granted patents·2 pending applications·7 citations·filing 2014–2017
54Inventor score
Files withPSK INC5
Top patents by PatentIndex Score
5 records- 0188US10109459B1Substrate treating apparatus, substrate treating method, and plasma generating unitPSK INC·Filed 2017·Granted Oct 23, 2018·7 cites·23 claims
- 0246US10312060B2Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the samePSK INC·Filed 2014·Granted Jun 4, 2019·0 cites·14 claims
- 0345US2015136734A1Substrate Treating Apparatus and MethodPSK INC·Filed 2014·Application pending·0 cites
- 0443US9536708B2Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating devicePSK INC·Filed 2014·Granted Jan 3, 2017·0 cites·27 claims
- 0531US2017301514A1Plasma source and substrate treating apparatus including the samePSK INC·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →