Inventor · disambiguated record
Chin-Tsan Jan
Also filed as: JAN CHIN-TSAN
5 granted patents·40 citations·filing 2002–2003
78Inventor score
Top patents by PatentIndex Score
5 records- 0166US6964419B2Chuck rollers and pins for substrate cleaning and drying systemTAIWAN SEMINCONDUCTOR MFG CO L·Filed 2003·Granted Nov 15, 2005·13 cites·17 claims
- 0260US6998013B2CMP apparatus polishing head with concentric pressure zonesTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 14, 2006·9 cites·8 claims
- 0358US6516675B1Bubble ultrasonic flow meterTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Feb 11, 2003·11 cites·20 claims
- 0457US7139641B2Wafer protection systemTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Nov 21, 2006·7 cites·20 claims
- 0533US6758724B2Online tension monitor system for robot x-belt of mirra CMPTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 6, 2004·0 cites·23 claims
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