Inventor · disambiguated record
Takushi Motoyama
Also filed as: MOTOYAMA TAKUSHI
8 granted patents·159 citations·filing 1989–2000
88Inventor score
Files withFUJITSU LTD8
Top patents by PatentIndex Score
8 records- 0177US6099992AMethod for designing reticle, reticle, and method for manufacturing semiconductor deviceFUJITSU LTD·Filed 1995·Granted Aug 8, 2000·49 cites·6 claims
- 0267US6553274B1Method for designing reticle, reticle, and method for manufacturing semiconductor deviceFUJITSU LTD·Filed 2000·Granted Apr 22, 2003·11 cites·6 claims
- 0365US5194364AProcess for formation of resist patternsFUJITSU LTD·Filed 1991·Granted Mar 16, 1993·20 cites·25 claims
- 0455US5621246ASubstrate for mounting integrated circuit semiconductor chipsFUJITSU LTD·Filed 1994·Granted Apr 15, 1997·25 cites·11 claims
- 0555US5403438AProcess for forming patternFUJITSU LTD·Filed 1994·Granted Apr 4, 1995·26 cites·6 claims
- 0642US5160404AMethod of removing a patterned multilevel resist from a surface layer on a substrateFUJITSU LTD·Filed 1990·Granted Nov 3, 1992·14 cites·15 claims
- 0737US4983543AMethod of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuitFUJITSU LTD·Filed 1989·Granted Jan 8, 1991·8 cites·14 claims
- 0832US5030316ATrench etching processFUJITSU LTD·Filed 1990·Granted Jul 9, 1991·6 cites·3 claims
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