Inventor · disambiguated record
Nagayasu Hiramatsu
Also filed as: HIRAMATSU NAGAYASU
6 granted patents·1 citations·filing 2017–2020
65Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0165US11069512B2Film forming apparatus and gas injection member used thereforTOKYO ELECTRON LTD·Filed 2017·Granted Jul 20, 2021·1 cites·10 claims
- 0249US10910225B2Film forming methodTOKYO ELECTRON LTD·Filed 2018·Granted Feb 2, 2021·0 cites·6 claims
- 0346US11629404B2Method of forming tungsten film and controllerTOKYO ELECTRON LTD·Filed 2019·Granted Apr 18, 2023·0 cites·11 claims
- 0445US11984319B2Substrate processing method and film forming systemTOKYO ELECTRON LTD·Filed 2020·Granted May 14, 2024·0 cites·16 claims
- 0540US11753719B2Flow rate control method, flow rate control device, and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 12, 2023·0 cites·8 claims
- 0640US10319585B2Film forming methodTOKYO ELECTRON LTD·Filed 2017·Granted Jun 11, 2019·0 cites·5 claims
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