Inventor · disambiguated record
Kaushal S. Patel
Also filed as: PATEL KAUSHAL · PATEL KAUSHAL S
8 granted patents·4 pending applications·72 citations·filing 2002–2009
84Inventor score
Top patents by PatentIndex Score
12 records- 0187US7563563B2Wet developable bottom antireflective coating composition and method for use thereofIBM·Filed 2006·Granted Jul 21, 2009·8 cites·1 claims
- 0284US7709187B2High resolution imaging process using an in-situ image modifying layerIBM·Filed 2006·Granted May 4, 2010·8 cites·23 claims
- 0384US6892781B2Method and apparatus for application of pressure to a workpiece by thermal expansionIBM·Filed 2002·Granted May 17, 2005·38 cites·12 claims
- 0480US7217496B2Fluorinated photoresist materials with improved etch resistant propertiesIBM·Filed 2004·Granted May 15, 2007·15 cites·26 claims
- 0573US7544750B2Top antireflective coating composition with low refractive index at 193nm radiation wavelengthIBM·Filed 2005·Granted Jun 9, 2009·3 cites·20 claims
- 0655US8202678B2Wet developable bottom antireflective coating composition and method for use thereofCHEN KUANG-JUNG J·Filed 2009·Granted Jun 19, 2012·0 cites·21 claims
- 0752US2008138631A1Method to reduce mechanical wear of immersion lithography apparatusIBM·Filed 2006·Application pending·0 cites
- 0850US7608390B2Top antireflective coating composition containing hydrophobic and acidic groupsIBM·Filed 2006·Granted Oct 27, 2009·0 cites·1 claims
- 0949US8304178B2Top antireflective coating composition containing hydrophobic and acidic groupsKHOJASTEH MAHMOUD·Filed 2009·Granted Nov 6, 2012·0 cites·12 claims
- 1041US2009093114A1Method of forming a dual-damascene structure using an underlayerBURNS SEAN DAVID·Filed 2007·Application pending·0 cites
- 1141US2007166648A1Integrated lithography and etch for dual damascene structuresIBM·Filed 2006·Application pending·0 cites
- 1235US2007231736A1Bottom antireflective coating composition and method for use thereofCHEN KUANG-JUNG J·Filed 2006·Application pending·0 cites
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