Inventor · disambiguated record
Yasuko Saito
Also filed as: SAITO YASUKO
5 granted patents·2 pending applications·8 citations·filing 2003–2006
69Inventor score
Top patents by PatentIndex Score
7 records- 0171US7275006B2Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program thereforADVANCED MASK INSPECTION TECH·Filed 2005·Granted Sep 25, 2007·4 cites·4 claims
- 0255US7664307B2Photomask manufacturing support systemNEC CORP·Filed 2005·Granted Feb 16, 2010·2 cites·2 claims
- 0348US7123004B2Method of non-destructive inspection of rear surface flaws and material characteristics using electromagnetic technique and apparatus thereforTOHOKU TECHNO ARCH CO LTD·Filed 2004·Granted Oct 17, 2006·2 cites·4 claims
- 0438US2007165938A1Pattern inspection apparatus and method and workpiece tested therebyADVANCED MASK INSPECTION TECH·Filed 2006·Application pending·0 cites
- 0536US7577287B2Early error detection during fabrication of reticlesNEC CORP·Filed 2005·Granted Aug 18, 2009·0 cites·13 claims
- 0636US7441226B2Method, system, apparatus and program for programming defect data for evaluation of reticle inspection apparatusNEC CORP·Filed 2004·Granted Oct 21, 2008·0 cites·6 claims
- 0736US2004007169A1Semiconductor nanoparticles and thin film containing the sameMITSUBISHI CHEM CORP·Filed 2003·Application pending·0 cites
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