Inventor · disambiguated record

Mariko Wakuda

Also filed as: WAKUDA MARIKO

2 granted patents·1 citations·filing 2005–2010

34Inventor score

Technology areasH10P

Files withSUMCO TECHXIV CORP1 WAKUDA MARIKO1

Top patents by PatentIndex Score

2 records

0156US7686891B2Method and apparatus for collecting chemicals from semiconductor waferSUMCO TECHXIV CORP·Filed 2005·Granted Mar 30, 2010·1 cites·1 claims
0233US8080113B2Method and apparatus for collecting chemicals from semiconductor waferWAKUDA MARIKO·Filed 2010·Granted Dec 20, 2011·0 cites·2 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →