Inventor · disambiguated record
Marcel Kollberg
Also filed as: KOLLBERG MARCEL
6 granted patents·5 pending applications·4 citations·filing 2011–2022
67Inventor score
Files withAIXTRON SE11
Top patents by PatentIndex Score
11 records- 0179US11702740B2Closure element for closing a loading opening of an inner housing of a CVD reactorAIXTRON SE·Filed 2018·Granted Jul 18, 2023·4 cites·9 claims
- 0256US12098462B2Method for producing a component part of a CVD reactorAIXTRON SE·Filed 2019·Granted Sep 24, 2024·0 cites·12 claims
- 0350US11286566B2Apparatus for deposition of a III-V semiconductor layerAIXTRON SE·Filed 2019·Granted Mar 29, 2022·0 cites·9 claims
- 0444US2013040054A1Coating device and method for operating a coating device having a shielding plateAIXTRON SE·Filed 2011·Application pending·0 cites
- 0543US10883171B2CVD reactor and method for cleaning a CVD reactorAIXTRON SE·Filed 2017·Granted Jan 5, 2021·0 cites·12 claims
- 0642US2024392441A1Cvd reactor with a supporting ring, and supporting ring for a substrateAIXTRON SE·Filed 2022·Application pending·0 cites
- 0741US2016225619A1Method and apparatus for deposition of a iii-v semiconductor layerAIXTRON SE·Filed 2016·Application pending·0 cites
- 0841US2022396877A1Wall-cooled gas-inlet element for a cvd reactorAIXTRON SE·Filed 2020·Application pending·0 cites
- 0940US12110591B2Susceptor arrangement of a CVD reactorAIXTRON SE·Filed 2020·Granted Oct 8, 2024·0 cites·10 claims
- 1035US11053586B2Coated flat component in a CVD reactorAIXTRON SE·Filed 2015·Granted Jul 6, 2021·0 cites·12 claims
- 1130US2015303091A1Device for orienting a wafer on a wafer carrierAIXTRON SE·Filed 2013·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →