Inventor · disambiguated record
Olivier Christian Maurice Lugier
Also filed as: LUGIER OLIVIER CHRISTIAN MAURICE
2 granted patents·1 pending application·0 citations·filing 2019–2023
25Inventor score
Technology areasH10P
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0163US2024011150A1Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of materialASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0257US12399428B2Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2021·Granted Aug 26, 2025·0 cites·20 claims
- 0348US11807937B2Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of materialASML NETHERLANDS BV·Filed 2019·Granted Nov 7, 2023·0 cites·6 claims
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