Inventor · disambiguated record
Erwin Paul Smakman
Also filed as: SMAKMAN ERWIN PAUL
13 granted patents·9 pending applications·9 citations·filing 2016–2024
84Inventor score
Files withASML NETHERLANDS BV22
Top patents by PatentIndex Score
22 records- 0190US10712669B2Method and apparatus for direct write maskless lithographyASML NETHERLANDS BV·Filed 2016·Granted Jul 14, 2020·4 cites·20 claims
- 0286US10527950B2Apparatus for direct write maskless lithographyASML NETHERLANDS BV·Filed 2017·Granted Jan 7, 2020·3 cites·20 claims
- 0385US12500063B2Method and apparatus for inspectionASML NETHERLANDS BV·Filed 2024·Granted Dec 16, 2025·0 cites·20 claims
- 0476US10928736B2Method and apparatus for direct write maskless lithographyASML NETHERLANDS BV·Filed 2016·Granted Feb 23, 2021·2 cites·20 claims
- 0574US11875966B2Method and apparatus for inspectionASML NETHERLANDS BV·Filed 2021·Granted Jan 16, 2024·0 cites·22 claims
- 0673US2025166960A1Sem image enhancement methods and systemsASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0759US12165836B2Systems and methods of profiling charged-particle beamsASML NETHERLANDS BV·Filed 2020·Granted Dec 10, 2024·0 cites·20 claims
- 0858US11094502B2Method and apparatus for inspectionASML NETHERLANDS BV·Filed 2016·Granted Aug 17, 2021·0 cites·20 claims
- 0958US2024128043A1Charged particle apparatus and methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1057US11881374B2Apparatus for and method of controlling an energy spread of a charged-particle beamASML NETHERLANDS BV·Filed 2020·Granted Jan 23, 2024·0 cites·15 claims
- 1157US2024339294A1Charged-particle optical apparatus and projection methodASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1257US2024339292A1Charged particle device, charged particle assessment apparatus, measuring method, and monitoring methodASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1357US2024331968A1Charged-particle apparatus, multi-device apparatus, method of using charged-particle apparatus and control methodASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1454US11942302B2Pulsed charged-particle beam systemASML NETHERLANDS BV·Filed 2019·Granted Mar 26, 2024·0 cites·15 claims
- 1554US2023324318A1Charged particle tool, calibration method, inspection methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1652US11243179B2Inspection tool, lithographic apparatus, electron beam source and an inspection methodASML NETHERLANDS BV·Filed 2018·Granted Feb 8, 2022·0 cites·20 claims
- 1752US2020018944A1Sem image enhancement methods and systemsASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 1848US2023048580A1Apparatus for and method of control of a charged particle beamASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1946US11791132B2Aperture array with integrated current measurementASML NETHERLANDS BV·Filed 2020·Granted Oct 17, 2023·0 cites·18 claims
- 2043US12313980B2Inspection system, lithographic apparatus, and inspection methodASML NETHERLANDS BV·Filed 2019·Granted May 27, 2025·0 cites·20 claims
- 2142US11747738B2Determining the combination of patterns to be applied to a substrate in a lithography stepASML NETHERLANDS BV·Filed 2017·Granted Sep 5, 2023·0 cites·20 claims
- 2241US2021249224A1Electron beam apparatus, inspection tool and inspection methodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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