Inventor · disambiguated record
Chin-Hsin Peng
Also filed as: PENG CHIN-HSIN
5 granted patents·3 pending applications·55 citations·filing 2000–2015
80Inventor score
Top patents by PatentIndex Score
8 records- 0169US6896304B2Automatic sensing wafer blade and method for usingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 24, 2005·18 cites·18 claims
- 0264US6926584B2Dual mode hybrid control and method for CMP slurryTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 9, 2005·12 cites·15 claims
- 0361US6860723B2Slurry flow control and monitor system for chemical mechanical polisherTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 1, 2005·9 cites·10 claims
- 0458US6843264B2Multi-phase pressure control valve for process chamberTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jan 18, 2005·10 cites·8 claims
- 0550US6733373B1Polishing assembly for a linear chemical mechanical polishing apparatus and method for formingTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted May 11, 2004·6 cites·13 claims
- 0639US2006023395A1Systems and methods for temperature control of semiconductor wafersTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 0735US2005016467A1System and method for dry chamber temperature controlTAIWAN SEMICONDUCTOR MFG·Filed 2003·Application pending·0 cites
- 0835US2016274569A1Scalable manufacturing system and method for implementing the sameARCADYAN TECHNOLOGY CORP·Filed 2015·Application pending·0 cites
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