Inventor · disambiguated record
Mitiaki Matsushita
Also filed as: MATSUSHITA MITIAKI
6 granted patents·1,129 citations·filing 1996–2002
89Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0198US6439822B1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 1999·Granted Aug 27, 2002·540 cites·15 claims
- 0298US6074154ASubstrate treatment system, substrate transfer system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 1997·Granted Jun 13, 2000·457 cites·8 claims
- 0392US6425722B1Substrate treatment system, substrate transfer system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2000·Granted Jul 30, 2002·54 cites·6 claims
- 0476US5685039ACleaning apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Nov 11, 1997·51 cites·20 claims
- 0574US6655891B2Substrate treatment system, substrate transfer system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2002·Granted Dec 2, 2003·13 cites·9 claims
- 0673US6746197B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2002·Granted Jun 8, 2004·14 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →