Inventor
MORISADA MASAHIRO
JP14 patents
Patents
14 patentsUS6160612ADec 12, 2000
Scanning type exposure apparatus, position control apparatus, and method therefor
CANON KK26 citations92
US5936710AAug 10, 1999
Scanning type exposure apparatus, position control apparatus, and method therefor
CANON KK39 citations92
US6903806B2Jun 7, 2005
Stage control apparatus, exposure apparatus, and device manufacturing method
CANON KK15 citations83
US7069114B2Jun 27, 2006
Anti-vibration technique
CANON KK6 citations73
US6975383B2Dec 13, 2005
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method
CANON KK9 citations73
US6937317B2Aug 30, 2005
Active damping apparatus, exposure apparatus and device manufacturing method
CANON KK11 citations73
US6864962B2Mar 8, 2005
Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same
CANON KK9 citations73
US5612602AMar 18, 1997
Device and method comprising a motor and/or a digital signal processor, means for supplying signals of a plurality of channels in serial form, or means for causing an actuator to abut an object
CANON KK14 citations73
US5233586AAug 3, 1993
Servo control system for controlling tracking of an optical head on an optical disk
CANON KK18 citations73
US7264235B2Sep 4, 2007
Active damping apparatus, exposure apparatus and device manufacturing method
CANON KK4 citations62
US7119879B2Oct 10, 2006
Stage alignment apparatus and its control method, exposure apparatus, and semiconductor device manufacturing method
CANON KK2 citations62
US7024284B2Apr 4, 2006
Anti-vibration technique
CANON KK2 citations62
US5305193AApr 19, 1994
Adaptive apparatus
CANON KK3 citations60
US7342645B2Mar 11, 2008
Stage control apparatus and method, stage apparatus and exposure apparatus
CANON KK0 citations41